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INVESTIGATION OF SIGMUND'S THERMAL SPIKE SPUTTERING MODEL
Author(s): 
Pages: 40-43
Year: Issue:  4
Journal: Yantai Teachers University journal(Natural Science

Keyword:  sputteringsputtering yieldenergy deposition;
Abstract: 对Singmund热尖峰溅射模型进行了修正.用平均能量淀积密度近似代替了Singmund热尖峰溅射模型中的表面能量淀积密度近似.并用TRIM87程序对Sb+,Bi+轰击银靶的能量淀积过程进行了模拟计算.将计算所得到的平均能量淀积密度代入修正后的Sig-mund热尖峰溅射模型中,所得到的起始热尖峰区尺寸与能量淀积理论相容.
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