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Effect of PEG on laser damage of sol-gel SiO2 anti-reflective coating
Author(s): 
Pages: 669-672
Year: Issue:  5
Journal: HIGH POWER LASER AND PARTICLE BEAMS

Keyword:  溶胶-凝胶法激光损伤阈值激光损伤形貌聚乙二醇;
Abstract: 采用溶胶-凝胶工艺制备了聚乙二醇(PEG)改性SiO2单层增透膜,用输出波长1.06μm,脉宽3ns的调Q激光系统产生的强激光进行辐照实验.观察了添加PEG前后的膜层的微结构、表面形貌以及激光损伤行为的变化,讨论了PEG对薄膜激光损伤行为产生影响的机制.结果表明:添加的PEG可以修饰、导向溶胶簇团的生长和交联,并使之有序,由此制备的薄膜结构规整,微缺陷减少,这就提高了膜层的激光损伤阈值;在激光辐照过程中,膜料吸收激光能量,膜层温度升高,膜层的PEG分子受热逐步分解挥发,膜层产生损伤.
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