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yong duo ceng mo ce shi jie gou zheng shi ruan x she xian xian wei shu fen bian lv da 20nm
Author(s): 
Pages: 16-18
Year: Issue:  9
Journal: LASER & OPTOELECTRONICS PROGRESS

Keyword:  软X射线显微术分辨率菲涅耳波带片;
Abstract: 用软X射线显微镜证实在2.07nm波长达到20m空间分辨率.软X射线显微镜根据菲涅耳波带片透镜和部分相干照明制成.通过溅射涂多层膜和透射电子显微术薄化技术形成的纳米结构测试花样提供清晰实验结果.
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