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Study of Thin Film Stress Measurements
Author(s): 
Pages: 28-32
Year: Issue:  9
Journal: LASER & OPTOELECTRONICS PROGRESS

Keyword:  光学薄膜应力激光干涉激光偏转X射线;
Abstract: 总结了薄膜应力的一些测量方法.将经常使用的方法归纳为激光宏观变形分析法和X射线分析法.介绍了利用测量基片弯曲曲率的激光宏观变形分析法(包括激光干涉法和激光束偏转法)和晶格变形的X射线衍射法等测量薄膜应力的理论依据及其测量原理,计算了各种测量方法的测量精度,X射线分析法的精度最高,其次是激光干涉法,而激光束偏转法的精度最低,分析了激光分析法和X射线分析法的优缺点.
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