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Two- Dimensional Nano- Positioning System Combined with Two- Dimensional Capacitive Displacement Sensor
Author(s): 
Pages: 137-141
Year: Issue:  2
Journal: NANOTECHNOLOGY AND PRECISION ENGINEERING

Keyword:  纳米定位压电陶瓷执行机电容传感器;
Abstract: 设计并研制了一种结构小巧的纳米级精密定位平台.该系统采用正交簧片式设计,有效地抑制了正交运动的耦合,同时应用一个二维电容微位移传感器作为位移标准来对定位平台实行反馈控制,有效地克服了压电陶瓷执行机的非线性和迟滞效应.实验结果表明,该系统定位精度优于1 nm,可在0.5μm×0.5μm范围内实行任意二维纳米循迹定位.给出了半径为2.5 nm的圆及外接圆半径约为5 nm的五角星形的定位轨迹图.该系统基本满足高精度引力实验精确定位的需求.
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