Self-consistent Kinetic Description of the Low-Pressure Solenoidal Inductively Coupled Argon Discharge
Author(s): MAO Ming, WANG Younian
Pages: 2640-2644
Year: 2005 Issue: 1
Journal: PLASMA SCIENCE AND TECHNOLOGY
Keyword: inductively coupled plasma; electron energy distribution; anomalous skin effect; power absorption;
Abstract: Using an one-dimensional slab model, we have studied the electron energy distribution, the anomalous skin effect, and power absorption in the solenoidal-inductively-coupled argon discharge under low pressures (≤1.33 Pa). The electron energy distribution function and rf electromagnetic field in the plasma are determined self-consistently by the linearized Bolztmann equation incorporating with the Maxwell equations. The numerical results show that, at low pressures, the electron energy distribution function exhibits a non-Maxwellian distribution with a long high-energy tail. The anomalous skin effect is greatly enhanced under low pressures and the negative power absorption is also obtained.
Pages: 2640-2644
Year: 2005 Issue: 1
Journal: PLASMA SCIENCE AND TECHNOLOGY
Keyword: inductively coupled plasma; electron energy distribution; anomalous skin effect; power absorption;
Abstract: Using an one-dimensional slab model, we have studied the electron energy distribution, the anomalous skin effect, and power absorption in the solenoidal-inductively-coupled argon discharge under low pressures (≤1.33 Pa). The electron energy distribution function and rf electromagnetic field in the plasma are determined self-consistently by the linearized Bolztmann equation incorporating with the Maxwell equations. The numerical results show that, at low pressures, the electron energy distribution function exhibits a non-Maxwellian distribution with a long high-energy tail. The anomalous skin effect is greatly enhanced under low pressures and the negative power absorption is also obtained.
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