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Flow Characteristics Simulation of Slurry under Megasonic Vibration
Author(s): 
Pages: 173-176
Year: Issue:  3
Journal: Journal of Liaoning Institute of Technology(Natural Science Edition)

Keyword:  兆声振动抛光垫孔隙抛光液流动特性有限元分析;
Abstract: 为研究兆声辅助化学机械抛光中振动对抛光液流体的影响.采用理论分析方法,研究兆声振动在抛光液中产生的声辐射压力,利用有限元分析,建立抛光过程中抛光垫单孔隙、抛光液层、声源等简化模型,研究兆声振动作用到抛光液中后抛光液的运动变化.结果 表明兆声振动能够对抛光液产生声辐射压力,其值大小与声压、流体密度、声速有关.有限元仿真分析表明,兆声振动能够使抛光垫孔隙内抛光液的流速加快,促进孔隙内外的抛光液进行交换.使得闲置在抛光垫孔隙内的部分抛光液流出,而部分携带残屑的抛光液则会流入到孔隙内.
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