Study of displacement sensor based on laser self-mixing interferometer
Author(s): YANG Ying, Tianjin Key Laboratory of Information Sensing and Intelligent Control, Tianjin University of Technology and Education
Pages: 5-7+15
Year: 2016 Issue: 4
Journal: Journal of Tianjin University of Technology and Education
Keyword: self-mixing interference; all-phase spectrum analysis; zero phase filter;
Abstract: In order to improve the measurement accuracy of displacement sensor based on self-mixing interferometer, zero phase filter is applied to pretreat self-mixing interference signals, which is used to remove the phase shift and aberration.The preprocessing algorithm based on zero phase filter is investigated. Then, the calibration result of piezoelectric ceramics is presented. The results indicate that before all-phase spectrum analysis signal processing technique based on zero phase filter can reduce the displacement error of self-mixing interferometer to 3.4 nm.
Pages: 5-7+15
Year: 2016 Issue: 4
Journal: Journal of Tianjin University of Technology and Education
Keyword: self-mixing interference; all-phase spectrum analysis; zero phase filter;
Abstract: In order to improve the measurement accuracy of displacement sensor based on self-mixing interferometer, zero phase filter is applied to pretreat self-mixing interference signals, which is used to remove the phase shift and aberration.The preprocessing algorithm based on zero phase filter is investigated. Then, the calibration result of piezoelectric ceramics is presented. The results indicate that before all-phase spectrum analysis signal processing technique based on zero phase filter can reduce the displacement error of self-mixing interferometer to 3.4 nm.
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