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Effect of Magnetic Field and Radical Plasma Density on Helicon Plasma Wave and Energy Deposition-A Numerical Simulation
Pages: 1286-1294
Year: Issue:  11
Journal: Vacuum Science and Technology

Keyword:  Helicon waveMagnetized plasmaEnergy depositionHigh-density plasma;
Abstract: The propagation and energy depositionof the plasma wave,excited by helicon antenna with a parabolic radial electron-density distribution inmagnetic field,were mathematically modeled,theoretically calculated and numerically simulated. The simulated results show that the axial magnetic field( B0) andradial distribution of plasma density( α) distribution significantly affect the energy deposition and radial field profile of m = 1 modes.For example,as B0 increases from 0. 02 to 0. 1 T and α decreases from 0. 83 to 0. 36,m = + 1 mode mainly propagates along the axis( r = 0),accompanied by an increasing axial energy deposition and an almost constant radial energy deposition. However,only in a given B0 range and at α = 0. 66,the m =-1 mode propagates with its radial energy deposition approaching to the plasma column edge. The dominance of m = + 1 mode includes a stronger fieldamplitude,a higher energy deposition on a much wider volume than m =- 1 mode,whose energy deposits merely around the antenna’s ionization zone.
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