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Outgassing Characteristics of Silicone Rubber Used in High Power Laser System
Pages: 1306-1310
Year: Issue:  11
Journal: Vacuum Science and Technology

Keyword:  High power laser systemNon-metallic materialOutgassing rateCondensable volatile matter;
Abstract: We experimentally addressed the outgassing properties of the silicone rubber,an important non-metallic materialin high-power laser system and a major contamination source of the optics. The influence of the baking conditions,such as the pressure,baking temperature and time,on the outgassing rate and outgassing compositions was investigated in constant volume method and with quadrupole mass spectrometer. The results show that the baking at 80℃ for 4h easily decreased the outgassing rate of silicone rubber from 2. 69 × 10-7down to 6. 47 × 10-8Pam3/ s·cm2,and reduced the release of condensable volatile matter from silicone rubber by 75%. Baked at 80℃for 4 h,the silicone rubber has an outgassing rate lower than 1 × 10-7Pam3/ s·cm2. We suggest that the silicon rubber baked under the optimized conditions may be a good material for fabrication of the high power laser system.
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