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Novel Capacitance Diaphragm Vacuum Gauge Adaptable to Environment of Saturated Steam and Charged Gases
Pages: 1316-1319
Year: Issue:  11
Journal: Vacuum Science and Technology

Keyword:  Shielding against charged particlesSaturated steamCapacitance diaphragm vacuum gaugeSCM control unit;
Abstract: The conventional capacitance diaphragm vacuum gauge was modified to rapidly and accurately measure a low pressure in an environment characterized with saturated steam and / or charged gases. The modification mainly included the package of ceramic tube housing,which effectively isolates the gauge from the charged particles,reactive gases and water vapor. The impact of the realistic situation,including but not limited to the temperature,humidity,components and material types of the gauge,on the measurement sensitivity was mathematically modeled and analytically investigated for its design optimization. In addition,the single-chip microcomputer( SCM) and temperature control units were adopted to improve the measurement precision. The test results show that the novel prototyped capacitance diaphragm vacuum gauge is capable of measuring rapidly,precisely and routinely the low pressure in an environment heavily "polluted"by water vapor,reactive gasses and ionized particles.
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