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Visualization measurement for the surface topology of silicon V-groove using optical coherence tomography(OCT)
Author(s): 
Pages: 534-537
Year: Issue:  6
Journal: Optical Technique

Keyword:  optical coherence tomographyV-groovesurface topographyspectral-domainvisualization;
Abstract: A visualization measurement method for silicon V-groove surface topology is introduced.The principle of spectraldomain optical coherence tomography(OCT)is analyzed.The imaging experiment is performed on the silicon V-groove by the experimental spectral-domain OCT system.The two-dimensional cross-sectional image is obtained,and the construction dimension is obtained by analyzing the two-dimensional cross-sectional image.It can reach visualization measurement method for silicon V-groove surface tomography with high accuracy.
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