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Novel Type of Linear Microwave Plasma Source with Two Waveguide Coupling Reactors Connected in Series
Pages: 906-909
Year: Issue:  8
Journal: Vacuum Science and Technology

Keyword:  Linear microwave plasmaPlasma diagnoseUniformityGuide antennaSeries connection;
Abstract: A novel type of linear microwave plasma source was developed by connecting in series two waveguide coupling reactors. The influence of the reaction cavity structure on the axial plasma distribution was investigated by measuring the optical emission spectrum at different axial positions withfiber optical spectrometer and by comparing the intensity emitted from different groups in the plasma. The results show that the newly-developed linear microwave plasma source is capable of stably generating a linear cylindrical plasma around the guide-antenna surface,and that the outer diameter of the guide-antenna and locations of the mode conversion control rods strongly affect the uniformity of axial plasm distribution. The axial non-uniformity of the plasma,generated by the novel linear microwave plasma source,with the guide antenna 4 mm in diameter and the mode conversion control rods inserted10 mm into the quartz tube on both ends,was estimated to be less than 10%.
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