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Effect of Buffer Layer on Properties of AZO Film
Author(s): 
Pages: 36-40
Year: Issue:  3
Journal: Experiment Science and Technology

Keyword:  AZO薄膜外延技术缓冲层;
Abstract: 该文综述了利用外延技术在高失配度的基片上生长同质或者异质缓冲层能够提高AZO薄膜的质量.重点阐述不同工艺条件下制备缓冲层对AZO薄膜光电性能影响,介绍AZO薄膜发展近况,并指出目前AZO薄膜发展瓶颈,展望了其未来发展趋势.
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