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Dynamic Balance and Vibration Suppression of Dry Scroll Vacuum Pump
Author(s): 
Pages: 613-617
Year: Issue:  6
Journal: Chinese Journal of Vacuum Science and Technology

Keyword:  Dry scroll vacuum pumpClump weightVibrationDynamic balance;
Abstract: The vibration balanceandvibrationsuppression of dry scroll vacuum pump was empirically approximated,mathematically modeled,theoretically analyzed in aerodynamics,numerically simulated in finite element method with software FLUENT,and experimentally investigated.The design modification included the barycentre adjustment of the orbiting scroll and the replacement of a uniform cooling fan plate with the plate consisting of a thick upper-sector and a thin lower-sector.The vibration balance of the scroll vacuum pump,with the newly-designed orbiting scroll and cooling fan plates,was experimentally evaluated and numerically simulated with the assistance of a dedicated fixture and an optimized clamp weight.The results show that the newly-modified design significantly damps the vibration of the dry scroll vacuum pump.To be specific,the dynamic balance precisionwas found to be better than 0.2 g,accompanied by die vibration suppression from 10 mm/s to about 1 mm/s roughly in an average time of 15 min.
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