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Influence of Electromagnetic Fieldon Properties of Arc-Ion Plated AlTiN Coatings
Pages: 666-671
Year: Issue:  6
Journal: Chinese Journal of Vacuum Science and Technology

Keyword:  Cathodic arc ion platingCathode spot motionAITN coatingsMicrostructureMechanical properties;
Abstract: The influence of the electromagnetic fieldon the synthesis and properties of the AlTiN coatings,deposited by cathodicarc ion plating was investigated with charge coupled device camera,X-ray diffraction,scanning electron microscopy and conventional mechanical probes.The results show that the voltage powering the EM field has a major impact on the motion of arc-spot,film growth,microstructures and mechanical properties.To be specific,as the voltage increased from 10 to 30 V,the arc-spots,with increasing spot number and moving at faster speed,shifted from the target edges toward the center;the deposition rate increased,accompanied by formation of small grains;its Vickers-hardness increased but the friction coefficient decreased.A voltage increase above 30 V increased the friction coefficient but weakly affected the deposition-rate,grain-size and hardness of the AlTiN coatings.Possible mechanisms responsible for the observation were briefly discussed.
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