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Synthesis and Characterization of Mechanical Properties of Superhard NbSiN Nanocomposite Coatings
Pages: 649-653
Year: Issue:  6
Journal: Vacuum Science and Technology

Keyword:  NbSiN nanocomposite filmMicrostructureSuperhardness effectStrengthening mechanism;
Abstract: The NbSiN nanocomposite coatings were deposited by magnetron sputtering the on Si substrate.The influence of the synthesis conditions,including but not limited to the area ratio of Nb and Si of the lab-made NbSi target,Si-content flow-rate,on the microstructures,phase-structures and mechanical properties of the NbSiN coatings was investigated with X-ray diffraction,high resolution transmission electron microscopy and nano-indentation techniques.The results show that the Si-content significantly affects the microstructures and mechanical properties.To be specific,as Si-content increased,the crystallinity,hardness,and elastic modulus changed in an increase-decrease mode;grown at a Si/Nb ratio of 5:20,the strongest hardness and elastic modulus were 33.6 and 297.2 GPa,respectively.As shown in HRTEM images,The film formed the nanocomposite structure with NbN nanocrystallites surrounded by crystallized Si3N4 interfacial phase,which could be characterized as the crystallized Si3N4 interfacial phase coordinated misorientations between NbN nanocrystallites and grew coherently with them,and denoted by nc-NbN/c-Si3N4 model,indicating that the superhardness effect resulted from the coherent epitaxial interface between NbN nanocrystallites and Si3N4 interfacial phase.
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