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Modeling and Simulation of Temperature Field in Al2O3 Ceramic Metallization
Pages: 718-722
Year: Issue:  6
Journal: Vacuum Science and Technology

Keyword:  Al 2 O 3 ceramicMetallizationProcessing parametersSimulation;
Abstract: The 3-D fluid-flow and temperature fields,in the furnace for Mo-covered Al2O3 ceramic metallization,were mathematically described with fluidflow heat transfer model theoretically analyzed in fluiddynamics,numerically simulated in finite volume method(FVM),and experimentally measured.The impact of the realistic situation,including the workpiece’s geometry and position,H2 flow-rate,temperature-dependent properties of the materials involved,radiation and convection and transfer of heat,on the time-evolution of the fluid-flow and temperature fields was investigated.The simulated results show that the time-evolution of the temperature distribution significantly depends on the H2 flow-rate,heating time and position.For example,the highest transient spatial sintering temperature-difference was 26℃,and the realistic temperature variation of the three metallization layers were 2040℃ lower than that of the loaded metallizationprofile.The simulated and measured results were in good agreement with a discrepancy below 0.67%.We suggest that the simulated results be of some technological interest in Al2O3 ceramic metallization.
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