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Potential Barrier Formation and Electric Field Reversal in Cylindrical Hollow Cathode Discharge
Pages: 1420-1426
Year: Issue:  12
Journal: Vacuum Science and Technology

Keyword:  Hollow cathode dischargeFluid-metastable atoms transport modelElectric fieldreversalParticle flow rate;
Abstract: The electric field-reversal in cylindrical hollow cathode discharge was mathematically described with fluid model and transport model of metastable Ar-atom,theoretically analyzed and numerically simulated. The potential distribution,electron and ion densities,an d particle flow rates at 220 V and 133 Pa of argon were calculated.The influence the variables,including but not limited to the voltage,diffusion rate and current density of electrons,on the field reversal was investigated. The peaks of electron and ion densities,2. 4 × 1010cm-3,locate at the discharge-cell center; however,the ion density is much higher than the electron density in the cathode sheath. Depending strongly on the ratio of the electron diffusion and flowing rates,the axial field-reversal occurs,accompanied by potential-barrier formation at the center,because the potential in negative glow region is higher than the anode potential. Moreover,an increase of the voltage fastens the electron diffusion rate,and enhances both the field reversal and potential-barrier formation.
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