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Emission Characteristics of Novel Metal-Insulator-Metal Emitter with Porous Al2O3 Insulation Layer
Pages: 1390-1395
Year: Issue:  11
Journal: Chinese Journal of Vacuum Science and Technology

Keyword:  Porous Al 2 O 3MIM emitterElectron emission characteristicsNegative resistance effect;
Abstract: A novel metal-insulator-metal(MIM) emitter was developed to reduce the negative resistance and enhance the emission stability of the conventional MIM emitter in gas ambient.The newly-developed MIM emitter consists of the Al bottom-electrode,porous Al2O3 layerand Au/Ti top-electrode.The porous Al2O3 layer,synthesized by anodic oxidation of the magnetron sputtered Al-coating,was etched with phosphoric acid to widen the pores.The impact of the microstructures of porous Al2O3 and Ti/Au top-electrode on the emission characteristics was investigated with scanning electron microscopy,atomic force microscopy,and field emission measurementin vacuum and at different pressures of N2 and air.The results show that the novel MIM emitter significantly increases the emission current and considerably reduces the negative resistance,possibly because of the increases of localized field enhancement factor and surface roughness,and because of a decrease of electron scattering energy.Depending on the pressure of air and/or N2,the emission current is capable of exciting N2 molecules.
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