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Fabrication of Folded Waveguide for Traveling Wave Tube by Ultra-Violet Lithography Galvanik Abformung
Pages: 1356-1361
Year: Issue:  11
Journal: Chinese Journal of Vacuum Science and Technology

Keyword:  MicrofabricationUV-LIGAFolded waveguideTraveling wave tube;
Abstract: The small-sized,folded waveguide(FWG) slow-wave structure,a component of traveling wave tube(TWT) operating at THz range,was successfully fabricated by ultra-violet lithography galvanikabformung(UV-LIGA).The FWG was designed and simulated with the self-developed software IESTWT platform.The impact of the UV-LIGA conditions,including but not limited to the fabrication of oxygen-free copper wafer,coating and removal of thick SU8 photoresist,UV-exposure,monofilament embedment,electroplating,and degassing temperature and time,on the fabrication tolerances and properties of the FWG was experimentally investigated.The prototyped FWG,fabricated with specifications:50W,20 dB at 220 GHz,channel radius of 0.09 mm,rectangle of 758 μm× 115 μm,and period of 235 μm,was experimentally characterized.The simulated and measured results show that the fine structure of the novel FWG displays nearly constant dispersion,high coupling impedance and low high-frequency loss.
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