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A New Coordinate Conversion Method for Spatial Transmission of Scattering Electrons
Author(s): REN Liming, CHEN Baoqin, TAN Zhenyu, GU Wenzuo
Pages: 24-
27
Year: 2002
Issue:
3
Journal: OPTO-ELECTRONIC ENGINEERING
Keyword: 电子束曝光; 蒙特卡罗法; 坐标转换;
Abstract: 提出一种新的随动坐标系矢量转换方法,给出用于转换散射电子空间输运坐标的矩阵方程.该方程具有递推的形式,计算方便,并且只涉及乘法运算,不会引起计算上的困难,将其用于PMMA(Si中电子散射过程的Monte Carlo模拟,结果表明可以有效节约机时,提高模拟效率,明显优于习惯上使用的静态坐标系方程.
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