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Novel Arc-Spot Control Unit in Arc Ion Plating Assisted by Multi-Mode AC Magnetic Fields
Pages: 913-918
Year: Issue:  8
Journal: Vacuum Science and Technology

Keyword:  Multi-mode AC magnetic fieldArc sourceAxial-symmetric diverging magnetic fieldMulti-mode reversed polarity dynamic focusing a;
Abstract: A novel arc-spot control unit was developed for the arc ion plating( AIP) assisted by multi-mode AC magnetic fields. The impact of the magnetic fields,generated in different modes,on the arc-spot’s motion was modeled,simulated in finite element method and tested in growth of Ti N-coatings. The simulated results show that the magnetic fields significantly improves AIP performance. To be specific,the axial-symmetric diverging magnetic field pushes the arc-spots outwards; the axial-symmetric arched magnetic field confines the arc-spot trajectory; and the dynamical focusing magnetic field in reversed polarity,driven independently by the coil-currents with differrent wave-shapes,frequencies and amplitudes,drags the arc-spot to the center and increases the ionization rate and ion density because of steady plasma transport and enhanced collision probability,and as shown in the tersted results,its superposition with the diverging and / or arched magnetic fileds is capable of dynamically controlling arc-spot motion,improving arc-spot discharge and reducing particle emission.
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