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Design of Single-Stage Three-Axis Roots Vacuum Pump and Its Pumping Mechanism
Pages: 934-939
Year: Issue:  8
Journal: Vacuum Science and Technology

Keyword:  Roots vacuum pumpThree rotor axesDesign theoryRotor profileCompression ratioDeformation calculation;
Abstract: The single-stage three-axis Roots vacuum pump was developed by modifying the conventional twoaxis Roots pump. In the newly-developed Roots pump,the two driven rotors,installed on both sides of the active rotor,are capable of sucking in and discharging air simultaneously. The profile equations of the circular arc,four-lobe rotors and formula of its pumping speed were derived based on the gearing principle. The characteristics of the old and new rotors,including but not limited to the rotating strength,thermal deformation,pumping efficiency and compression ratio,were empirically approximated,mathematically modeled,theoretically analyzed and numerically simulated in finite element method. The calculated and simulated results show that the novel pump significantly outperforms the conventional one. To be specific,in addition to higher dynamic stability,lower noise and more uniform stress,the novel pump has higher zero-flow compression-ratio and nearly two times higher pumping-speed than those of the conventional one.
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