Design of LIGA end-station and its applications
Author(s): TIAN Yang-chao, LIU Gang, HONG Yi-lin, GUO Yu-hua, XIONG Ying, KAN Ya
Pages: 387-391
Year: 2007 Issue: Z1
Journal: Journal of University of Science and Technology of China
Keyword: synchrotron radiation; LIGA; deep lithography;
Abstract: LIGA end-station constructed in NSRL Phase Ⅱ Project was presented.The effects of Fresnel diffraction and photo electrons on the accuracy of deep X-ray lithography were investigated,and then the parameters of the LIGA experimental end-station were obtained based on the calculations.At last the experiment results of the deep X-ray lithography,microelectroforming and plastic moulding at the station were presented.
Pages: 387-391
Year: 2007 Issue: Z1
Journal: Journal of University of Science and Technology of China
Keyword: synchrotron radiation; LIGA; deep lithography;
Abstract: LIGA end-station constructed in NSRL Phase Ⅱ Project was presented.The effects of Fresnel diffraction and photo electrons on the accuracy of deep X-ray lithography were investigated,and then the parameters of the LIGA experimental end-station were obtained based on the calculations.At last the experiment results of the deep X-ray lithography,microelectroforming and plastic moulding at the station were presented.
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