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High Performance ZnS Infrared Anti-Reflection Film Deposited by the Ion Assisted Deposition (IAD) Technology
Author(s): 
Pages: 70-74
Year: Issue:  4
Journal: Aerospace Control

Keyword:  Ion beam evaporationThermal evaporationIR anti-reflection film;
Abstract: This paper presents the high performance ZnS infrared Anti -reflecion film de-posited by the IAD technology in the Ge Substrate with high refractive index and gives its pro-cess development. As compared with the ZnS anti - reflestion film deposited by the normalthermal vapor deposition coating, the IAD technology has improved the optical characteritic ofZnS IR anti - reflection film coating quality, film microstracture and stress state. The testresults hare shown that the IAD Technology can be able to meet the requrimets for IR earthsensors with long life and high reliability.
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