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Design of Piezoelectric Optical Scanner in Flow Cytometer
Author(s): 
Pages: 186-192
Year: Issue:  3
Journal: Nanotechnology and Precision Engineering

Keyword:  piezoelectric optical scanneroptical scanningresonant vibrationfinite element simulation;
Abstract: Regarding the application requirements of imaging in flow cytometer,a one-dimensional piezoelectric optical scanner was designed and tested. It converts the stretching oscillations of the piezoelectric sheet into the resonant rotary vibration of scanning mirror,applying micro hinges. Firstly,the working modes were obtained and the influence of structural dimensions on resonant frequencies and maximum scanning angles were investigated by structure modeling and performance analysis with finite element simulation. Secondly,a prototype scanner was fabricated with piezoelectric sheet and silicon substrate. Finally,the scanning angles and frequency responses of the prototype were tested using angle measurement system. Experimental results show that with a 2 mm × 2 mm square mirror,a scanning angle of 14° can be achieved at resonant frequency of 10. 034 k Hz with driving voltage of 12 Vppand the scanner can still produce a scanning angle of 3. 35° at high frequency of 21. 26 k Hz with driving voltage of 5. 2Vpp. The prototype presents a high Q value of 865 and the scanning angles change linearly with driving voltage amplitude. The scanner has a large mirror size and high scanning frequency,which can meet the requirements of rapid and high resolution imaging in flow cytometer.
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