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The synthesis and in-flight passivation of silicon nanocrystals via PECVD
Pages: 928-934
Year: Issue:  6
Journal: Journal of Southwest University for Nationalities(Natrual Science Edition)

Keyword:  纳米晶硅PECVD制备表面改性;
Abstract: 通过等离子体增强化学气相沉积法(PECVD)制备粒径大小可以控制的硅纳米晶体,并对制备的纳米晶硅进行了在线表面改性.实验结果表明:成功获得了表面经烃基改性的不同粒径的纳米晶硅.相较于没有改性的纳米晶硅,它具有良好的抗氧化性和抗团簇能力,在有机溶剂中有着很好的分散性.
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