Author(s): Seon-Geun OH, Young-Jun LEE, Jae-Hong JEON, Jong-Hyeon SEO, Hee-Hwan CHOE, School of Electronics, Telecommunication and Computer Engineering, Korea Aerospace University, Department of Material Science and Engineering, Korea Aerospace University
Pages: 758-766
Year: 2014 Issue:  8
Journal: Plasma Science and Technology
Keyword:  plasma; ICP; antenna configuration; simulation;
Abstract: Spatial distributions of plasma parameters such as electron density, electron temperature and electric potential were investigated using a commercial simulation software(COMSOLTM) to predict the effects of antenna configuration in a large area inductively coupled plasma(ICP) system for flat panel displays. Nine planar antenna sets were evenly placed above a ceramic window. While the electron density was influenced by both the input current and gas pressure, the electron temperature and electric potential were dominantly affected by the gas pressure.