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Real-Time Mass Spectroscopy Study of Residual Gases in Degassing of High Power Klystron
Pages: 325-328
Year: Issue:  4
Journal: Chinese Journal of Vacuum Science and Technology

Keyword:  KlystronQuadrupole mass spectrometerThe residual gasCLCTN107;
Abstract: The time evolution of the partial pressuresofmajor residual gases in a high powerklystron during thermal degassingwas in-situ monitored with quadrupole mass spectroscopy.The impact of the baking temperature on the partial pressures of the major residual gases,including but not limited to H2O,CO,and H2,was investigated.As the temperature increased,three distinctive pressure peaks of the residual gaseswere successively identified at30,75,and 325℃,respectively,possibly because of the thermal desorption of H2O,CO,and H2from the oxide cathode of klystron,as shown in the mass spectra.In the long-time baking stage at450℃,the fairly lowdegassing rate remained almost constant.After cooleddown for 6 h,the pressure was estimated to be 4.3× 10-8 Pa,with partial pressure of the residual gases,mainly harmless CO,much lower than klystron’s critical pressure of 1.2× 10- 5 Pa.
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