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Synthesis of CrN Coatings by Symmetrical Bipolar Pulsed Magnetron Sputtering and Its Corrosion Resistance
Pages: 1242-1245
Year: Issue:  12
Journal: Vacuum Science and Technology

Keyword:  Mid-frequecy magnetron sputteringCrN filmsCorrosion behaviorCorrosion potentialXRD;
Abstract: The CrN coatings were deposited by symmetrical bipolar pulsed magnetron sputtering on substrate of the 201 stainless steel. The impacts of the coating condit ions, including the nitrogen flow rate, bias voltage, and pressure, on the microstructures and mechanical properties of the CrN coat ing were evaluated. The CrN coatings were characterized with Xray diffraction( XRD), scanning electron microscopy, and mechanical probes. The results show that the ratio of N2 and Ar flow rates, strongly affects the microstructures of the CrN coatings with improved corrosion resistance. For instance, as the ratio increased, the preferential growth orientation turned from < 111 > into < 200>, some of the Cr2N phase changed into the CrN phase. At the ratios of 33% and 100%, the corrosion potent ials were estimated to be0117 V and0133 V. Grown at 33%, the compact smooth CrN coatings resisted the corrosion of salt spray fairly well for 200 h.
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