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Cavity and Microfluidics Fabrication Technology on LTCC Substrate
Pages: 22-25
Year: Issue:  1
Journal: Electronics Process Technology

Keyword:  LTCCCavity structuresMicrofluidics;
Abstract: Briefly introduce the structure and the application of LTCC cavity and microfluidics, as well as the fabrication method of LTCC cavity. Analyze the reason of LTCC cavity deformation when it is laminated and sintered. Expound the method of controlling cavity deformation with filling material, characteristics and functions of carbon sacrificial material, and theoretical basis of controlling cavity deformation. The efficiency of the carbon sacrificial material was verified by the test. It is found that reasonable filling materials and appropriate technology can fabricate qualified cavity and microfluidics.
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