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Technology design of waste gas treatment during production of polysilicon
Pages: 71-73
Year: Issue:  4
Journal: Light Metals

Keyword:  polysiliconwaste gastreatmenttechnology design;
Abstract: Polysilicon is a key raw material in solar energy and micro-electronics industry.With the rapid development of solar energy industry in China,polysilicon demands are also increasing.The application,classification and technology progress are introduced in this paper,Siemens process is improved,and shortcomings of waste gas and waste water treatment during production of polysilicon in majority of enterprises are analyzed,then a new technology design for waste gas treatment is proposed.
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