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Research on testing techniques for larger aperture aspherical surface in the fine grinding stage
Author(s): 
Pages: 509-511
Year: Issue:  6
Journal: OPTICAL TECHNIQUE

Keyword:  zernike多项式最小二乘法波面局部插值法;
Abstract: 介绍了一种大相对口径非球面精磨阶段面形的测量方法原理及实现其功能的软件设计.利用机械接触式装置,通过长导轨及其光栅探头的高度变化来直接测量非球面的矢高,并把所测得的三维数据传输给计算机.经数据修正和预处理,通过MATLAB软件计算得到整个镜子的面形特征参数.其结果用来指导大口径非球面的精磨加工.
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