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Digital testing of transmitted wavefront distortion for micro-optics
Author(s): 
Pages: 539-540
Year: Issue:  6
Journal: OPTICAL TECHNIQUE

Keyword:  透过波面畸变微光学光学检测干涉图;
Abstract: 介绍了由浙江大学研制的CQG-II型车间数字干涉仪检测φ3.6 mm×0.5 mm平行平面玻璃的透过波面畸变的情况.最近研制出的干涉仪测量的最大口径为φ60 mm,采用移相式条纹扫描数字化处理,基于WINDOWS操作系统实现实时检测,以优于λ/30的精度计算出被检件的波面误差.工厂生产检测表明:在上述仪器上增加一个4倍口径的放大系统,可以使通光口径φ3.1 mm的工件达到4200个采样点,仪器的透射测量标准干涉腔误差PV≤0.028λ,仪器隔日多次测量重复性PV≤0.03λ.该仪器已经正常投入使用,生产的用于光学信息产品的微型光学件已为日本先锋公司(PIONEER)复检通过,成为工厂批量生产过程质量控制(QC)的重要手段.
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