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Super-precision positioning stage with nanometer resolution
Author(s): 
Pages: 556-557,559
Year: Issue:  6
Journal: OPTICAL TECHNIQUE

Keyword:  柔性铰链定位工作台纳米级分辨率压电陶瓷双频激光干涉仪;
Abstract: 柔性铰链精密定位工作台具有直接传动、无摩擦、结构紧凑、重量轻、刚度好及分辨率高等优点.设计了一种具有较大传动比的定位工作台,介绍了其系统结构和工作原理,并对刚度性能作了分析.利用双频激光干涉仪对压电陶瓷驱动下的工作台特性进行了测量.结果表明,该工作台具有纳米级的分辨率和定位精度.
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