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al2o3 tao ci ji pian chen ji zuo mo de zhi gou yan jiu
Pages: 401-404
Year: Issue:  6
Journal: Vacuum Science and Technology

Keyword:  TextureIon-beam assisted deposition(IBAD)Plastic flow;
Abstract: Molybdenum films were deposited on polycrystalline Al2O3,single crystal Al2O3 (0001)and glass substrates by E-gun evaporation and ion-beam assisted deposition (IBAD). The texture of the films have been studied by XRD and TEM. The results show that a strong (110) texture in the films deposited by evaporation is changed to (200) texture by increasing the energy of Ar+ bombardment. Calculation of the stress in the film and the TEM observation indicate that there is a change of non-uniform plastic flow in the aolybdenum film which results in the (100) texture.
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