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li hua yuan zi qun shu (icb) wai yan cdte bao mo de yan jiu
Author(s): 
Pages: 84-88
Year: Issue:  2
Journal: Vacuum Science and Technology

Keyword:  非平衡条件离子含量离子源主要特点离化原子电子衍射负高压半高宽真空度实验结果;
Abstract: <正> 一、引言1972年,日本京都大学Takagi和Yamada等人提出一种新型的离子源,发明了离化原子群束(Ionized cluster beams)外延技术。ICB外延是一种非平衡条件下的真空蒸发和离子束方法相结合的薄膜淀积新工艺。它具有三个主要特点:1.离化原子群的荷质比小,能在低能量获得高的淀积速率;2.容易控制离化原子群的能量和离子含量,可
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