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yi zhong jue dui xing dian rong bao mo zhen kong ji de yan zhi
Author(s): 
Pages: 265-269
Year: Issue:  4
Journal: Vacuum Science and Technology

Keyword:  CapacitanceDiaphragmVacuum-meter;
Abstract: This paper introduces an absolute capacitance diaphragm gauge which is made using magnetron sputtering, and the measurement circuits attached to it. The measurement range of this gauge is from 1.3Pa to 105Pa (1×10(-2) ~760 Torr) which covers five stages. The gauge and the capacitance signal detection circuits are placed inside one metal shell to avoid disturbance from the outside. The temperature fluctuation inside the thermostat is less than±0.1℃, thus the influence of temperature is effectively reduced. The non-linearity of the circuits is less than 0.4% and the ouput drift under high vacuum condition is less than 0.1% R. The relative error is less than 4% R in measuring pressure ranging from 13 Pa to 105Pa.
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