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shi ying jing ti xie zhen pin lv yu qi wei liang fu zhuo zhi liang de guan xi
Author(s): 
Pages: 100-103
Year: Issue:  2
Journal: Vacuum Science and Technology

Keyword:  石英晶体振动模式厚度切变振动压电效应石英晶片蒸发源无油超高真空系统蒸发物谐振频率物理性质;
Abstract: <正> 一、引言利用石英晶体的压电效应可以制成晶体振荡器。石英晶片(以下简称晶片)的谐振频率受晶片上附着(或去掉)质量的影响最灵敏的振动模式是高频厚度切变振动模式。厚度切变振动晶片的谐振频率由其频率方程决定。用压电石英谐振子定量测量
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