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ji yu biao mian wei ji xie he ya dian bao mo ji shu de xin xing wei xie zhen qi
Pages: 307-308
Year: Issue:  4
Journal: Vacuum Science and Technology

Keyword:  Bulk acoustic wave devicesSurface micromachinePiezoelectric thin film;
Abstract: A new structure for bulk acoustic are(BAW) microresonators based on surface micromachine and piezoelectric thin films technology has been presented The structure is formed of thin film of piezoelectric zine oxide(ZnO)deposited on a polysilicon membrane The ZnO film is c-axis oriented and groen by S-gun magnetron sputtering while the polysificon micromachine The abilityato fabricate this surface microstructure in planar process through a combination of wet chemical etching of a sacrificial oxide space and lift-off photolithography may represent a significant improvement in ease of fabrication yield and reiability over previous fabrication technique based on anisotropic etching of silicon The size of microresonators are 150μm× 150μm and 250μm×250μm. The resonant frequency is 559.05MHz.
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