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li zi shu jian she zuo yong xia ju si fu yi xi bao mo de zhi bei fang fa
Author(s): 
Pages: 224-226
Year: Issue:  3
Journal: Vacuum Science and Technology

Keyword:  聚四氟乙烯薄膜离子束溅射沉积X射线光电子能谱傅立叶变换红外光谱;
Abstract: 在多功能离子束辅助沉积装置上采用交替溅射和冷却聚四氟乙烯靶材的方法制备了薄膜。由XPS的结果可知,所得薄膜主要由CF2结构组成;FT-IR的结果表明,所得薄膜由C-F的最强吸收峰和聚四氟乙烯的特征吸收峰构成。所得薄膜的这些结构特征与聚四氟乙烯的结构是一致的。试验结果表明,用这种离子束溅射沉积方法可以获得聚四氟乙烯薄膜。
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