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lan zhou wu li yan jiu suo zui xin yan zhi cheng gong de re deng si hua xue qi xiang chen ji jin gang shi bao mo
Author(s): 
Pages: 69-70
Year: Issue:  1
Journal: Vacuum and Cryogenics

Keyword:  合成金刚石化学气相沉积按比例放大金刚石膜加热炉真空系统甲烷沉积室电阻率生长过程;
Abstract: <正> 有各种方法,可用于在低压下合成金刚石膜。我们采用了热钨丝辅助化学气相沉积的方法。这个方法的优点是成膜比较均匀,且比较容易按比例放大。在一真空系统内置一个加热炉,以提供衬底从600℃到800℃的温度范围,在衬底上方置一钨灯丝,其工作在1700℃到1900℃,甲烷和氢气按一定比例混合后进入沉积室,甲烷所占的体积比为0.5%—1%,剩余的是氢气。在生长过程中,热钨丝在甲烷的作用下,将生成 W2C,其电阻率也相应变
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