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yong xin xing shuang dui ba jian she yi zhi bei de fe/ti duo ceng mo de jie gou te zheng
Pages: 440-445
Year: Issue:  6
Journal: Vacuum Science and Technology

Keyword:  Dual-facing-targetSputterMagnetic multilayered filmsMedulated structure;
Abstract: Magnetron dual-facing-target sputtering (DFTS-Ⅱ) system,which was designed on the basic principle of the facing-target sputtering (FTS),has the advantage of sputtering continuously and homogeneously at low substrate temperature with high productivity as well as less composition difference. In addition, it can sputter with different materials simultaneously or alternatively. The Fe/Ti multilayered films (MLF) prepared by DFTS have good quality of medulated periedicity. The structure of their innerlayers is of Ti (0002) hcp and Fe bcc polycrystalline [mainly of α-Fe(110)]. Meanwhile,there exists interdiffusion of Fe,Ti atoms at Fe-Ti interface in Fe/Ti MLF.
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