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ibad zuo mo yu al2o3 0001 dan jing jie mian de hrem yan jiu
Pages: 321-325
Year: Issue:  5
Journal: Vacuum Science and Technology

Keyword:  Ion-beam assisted deposition (IBAD)InterfaceMicrostructure;
Abstract: 采用中等能量离子束辅助沉积(IBAD)技术在单晶Al2O3(0001)基片上沉积钼膜,通过HREM等分析手段,在原子尺度上,对于钼膜及其与Al2O3单晶基体界面的显微结构进行了研究。结果表明:钼膜的晶粒呈细小柱状或纤维状,平均晶粒尺寸约为8nm,钼膜的致密度较高,膜内存在非晶组织。在钼膜与Al2O3单晶基片之间存在厚约10~15nm的非晶过渡层,在界面处未发现原子的长程扩散。非晶过渡层与钼膜界面处存在台阶,增加了钼膜的形核点。
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