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er yuan he jin huo hun he wu ba bei san she fen xi de ji ge shi li
Author(s): 
Pages: 122-128
Year: Issue:  2
Journal: Vacuum Science and Technology

Keyword:  背散射分析卢瑟福背散射背散射谱薄膜电阻深度分布薄膜材料非均匀分布组份比分析手段离子注入;
Abstract: <正> 一、引言卢瑟福背散射分析方法(RBS)是一种无损快速的表面(10(?)~10nm)分析技术。它能给出以下几方面的信息:1.表面薄层的厚度及元素组成;2.元素的含量,3.元素的深度分布剖面。所以它对薄膜材料的研究,提供了一种有效的分析手段。
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