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n~+ fan chong zhu ru tie mo biao mian gai xing de xian wei fen xi yan jiu
Pages: 466-472
Year: Issue:  6
Journal: Vacuum Science and Technology

Keyword:  氮化物相反冲注入工业纯铁表面显微硬度微观组织结构透射电子显微分析弥散度膜表面改性分析结果电子衍射研究;
Abstract: Both ion implantation and surface coating are techniques to improve the property of surfaces. Combination of the two, the recoil implantation, possesses more advantages. The microstructure of the recoil-implanted pure iron (coated with Fe, then bombarded by N~+) was studied with SEM, TEM, and XRD analyses, and compared with that of N~+ implanted pure iron. The results show that more nitrides were formed on the surface of the specimens with pure iron coating film than that of uncoated specimens. Especially, the nitrides in very fine crystal state distributed in α-phase iron film. This probably is the main reason cause of the surface modification.
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