n~+ fan chong zhu ru tie mo biao mian gai xing de xian wei fen xi yan jiu
Author(s): Liu Furun, Lu Guangyuan
Pages: 466-472
Year: 1992 Issue: 6
Journal: Vacuum Science and Technology
Keyword: 氮化物相; 反冲注入; 工业纯铁; 表面显微硬度; 微观组织结构; 透射电子显微分析; 弥散度; 膜表面改性; 分析结果; 电子衍射研究;
Abstract: Both ion implantation and surface coating are techniques to improve the property of surfaces. Combination of the two, the recoil implantation, possesses more advantages. The microstructure of the recoil-implanted pure iron (coated with Fe, then bombarded by N~+) was studied with SEM, TEM, and XRD analyses, and compared with that of N~+ implanted pure iron. The results show that more nitrides were formed on the surface of the specimens with pure iron coating film than that of uncoated specimens. Especially, the nitrides in very fine crystal state distributed in α-phase iron film. This probably is the main reason cause of the surface modification.
Pages: 466-472
Year: 1992 Issue: 6
Journal: Vacuum Science and Technology
Keyword: 氮化物相; 反冲注入; 工业纯铁; 表面显微硬度; 微观组织结构; 透射电子显微分析; 弥散度; 膜表面改性; 分析结果; 电子衍射研究;
Abstract: Both ion implantation and surface coating are techniques to improve the property of surfaces. Combination of the two, the recoil implantation, possesses more advantages. The microstructure of the recoil-implanted pure iron (coated with Fe, then bombarded by N~+) was studied with SEM, TEM, and XRD analyses, and compared with that of N~+ implanted pure iron. The results show that more nitrides were formed on the surface of the specimens with pure iron coating film than that of uncoated specimens. Especially, the nitrides in very fine crystal state distributed in α-phase iron film. This probably is the main reason cause of the surface modification.
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