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li zi shu chen ji lei jin gang shi mo zuo wei tai yang dian chi jian fan she tu ceng yan jiu
Author(s): 
Pages: 453-460
Year: Issue:  6
Journal: Vacuum Science and Technology

Keyword:  单晶硅太阳电池类金刚石膜减反膜离子束沉积沉积参数离子束技术单晶硅片石英片关系曲线效率比;
Abstract: 利用低能离子束技术,把甲烷(CH4)气体离解,在石英和单晶硅片表面沉积类金刚石膜(DLC膜),研究了该膜在可见光区的光学特性与沉积参数的关系。在单晶硅太阳电池表面,沉积DLC膜作为减反膜及保护膜的研究,获得了有减反膜的单晶硅太阳电池效率比无减反膜电池效率提高了28%以上的结果。
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