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di liu zhang zls 23 xing hai zhi pu jian lou yi dian lu qian xi
Pages: 42-60
Year: Issue:  S1
Journal: Vacuum and Cryogenics

Keyword:  发射电流离子流放大器真空度测量电路参考电压离子源氦质谱检漏仪稳流电路交流电压电源电压;
Abstract: <正> ZLS—23型氦质谱检漏仪是一种技术性能比较完备的仪器。同其他类型仪器一样,其技术指标的高低在很大程度上取决于其电子线路的设计与调试所得的技术性能。对仪器电路性能的了解,往往是使用和维修仪器方面十分重要的问题。ZLS—23型检漏仪的电路框图如图28所示。可粗略地分为真空操作与测量电路、工作条件电路和漏孔测量指示电路三大部分。真空操作与测量电路是为了给抽气系统,给真空室和
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