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ping jia du mo yu ji cai jie he li de yi zhong xin fang fa
Author(s): 
Pages: 266-269
Year: Issue:  4
Journal: Vacuum Science and Technology

Keyword:  结合力表面镀膜新方法动态拉伸扫描电子显微镜物理气相沉积基材半定量形变量裂纹萌生;
Abstract: 本文研究测量PVD(物理气相沉积)镀膜与基材结合力的一种新方法——动态拉伸法。即在扫描电子显微镜(带有微型拉伸实验台)下观察产生恒应变的试样表面镀膜的裂纹萌生、扩展及脱落过程,并根据不同形变量来判断其结合力的差异。此种方法可以直接观察得到半定量的测量结果。
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